| 发明名称 |
KINEMATIC PIN WITH SHEAR MEMBER AND SUBSTRATE CARRIER FOR USE THEREWITH |
| 摘要 |
<p>A kinematic pin and a substrate carrier adapted to deter dislodgment of the substrate carrier from the kinematic pin are provided. A shear member on the kinematic pin interacts with a shear feature of the substrate carrier to deter lateral movement of the substrate carrier relative to the kinematic pin. A substrate carrier handler that employs the kinematic pin is also provided.</p> |
| 申请公布号 |
KR20050046643(A) |
申请公布日期 |
2005.05.18 |
| 申请号 |
KR20040092827 |
申请日期 |
2004.11.13 |
| 申请人 |
APPLIED MATERIALS INC. |
发明人 |
ELLIOTT, MARTIN R.;ENGLHARDT, ERIC A.;HUDGENS, JEFFREY C.;LOWRANCE, ROBERT B.;RICE, MICHAEL ROBERT |
| 分类号 |
H01L21/68;B65G49/07;H01L21/00;(IPC1-7):H01L21/68 |
主分类号 |
H01L21/68 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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