| 摘要 |
<p>Disclosed is an illumination optical system and an exposure apparatus having the same. In one aspect, the illumination optical system illuminates a surface (16) to be illuminated, with light from a light source (2), wherein it includes a mirror (11) having a reflection surface, and a stop (15) having an aperture surface disposed approximately perpendicularly to the reflection surface of the mirror.</p> |
