发明名称 High-density finFET integration scheme
摘要 The invention provides a method of manufacturing a fin-type field effect transistor (FinFET) that forms a unique FinFET that has a first fin with a central channel region and source and drain regions adjacent the channel region, a gate intersecting the first fin and covering the channel region, and a second fin having only a channel region.
申请公布号 US6894326(B2) 申请公布日期 2005.05.17
申请号 US20030604077 申请日期 2003.06.25
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 NOWAK EDWARD J.
分类号 H01L21/336;H01L21/84;H01L27/12;H01L29/786;(IPC1-7):H01L29/76 主分类号 H01L21/336
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