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发明名称
A BAKE APPARATUS FOR SEMICONDUCTOR PROCESSING
摘要
申请公布号
KR20050045265(A)
申请公布日期
2005.05.17
申请号
KR20030079259
申请日期
2003.11.10
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
CHO, YOUNG JUNE;CHOI, DUG KYU;GONG, JONG TAK;LEE, GYU MYEUNG
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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