发明名称 Vapor delivery system
摘要 The present invention provides a vapor delivery system and method for efficiently producing water vapor on demand. More particularly, the present invention produces low-temperature water vapor, without the formation of ice, by maintaining a sufficient volume of water at a sufficient temperature within a vaporizer chamber when the pressure in the vaporizer chamber is lowered.
申请公布号 US6895178(B2) 申请公布日期 2005.05.17
申请号 US20020196572 申请日期 2002.07.16
申请人 MKS INSTRUMENTS, INC. 发明人 GU YOUFAN;DOZORETZ PAUL;GOSS BENJAMIN;NEUMEISTER DAVID;MUELLER JAMES;HIGGINS DONALD W.
分类号 F22B35/00;B01D1/00;F22B1/28;(IPC1-7):F24F6/00 主分类号 F22B35/00
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