发明名称 Manipulator for an optical or particle-optical apparatus
摘要 The invention is directed to a manipulator for an optical apparatus including a particle-optical apparatus. The manipulator is especially a diaphragm or specimen manipulator in an electron microscope. The component ( 4 ), which is to manipulated, is accommodated by a transfer body ( 2 ) movable relative to a spatially-fixed component ( 1 ) and the transfer body ( 2 ) includes a composite material having a high thermal conductivity while simultaneously having a vanishing or negative thermal expansion coefficient in the direction of the connecting axis (B-B) between the component ( 4 ) and the spatially-fixed component ( 1 ).
申请公布号 US6894288(B2) 申请公布日期 2005.05.17
申请号 US20030394201 申请日期 2003.03.24
申请人 LEO ELEKTRONENMIKROSKOPIE GMBH 发明人 MUELLER HELMUT;TOBIAS DANIEL
分类号 H01J37/09;H01J37/20;H01J37/26;(IPC1-7):H01J37/15;G02B21/34 主分类号 H01J37/09
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