发明名称 |
Manipulator for an optical or particle-optical apparatus |
摘要 |
The invention is directed to a manipulator for an optical apparatus including a particle-optical apparatus. The manipulator is especially a diaphragm or specimen manipulator in an electron microscope. The component ( 4 ), which is to manipulated, is accommodated by a transfer body ( 2 ) movable relative to a spatially-fixed component ( 1 ) and the transfer body ( 2 ) includes a composite material having a high thermal conductivity while simultaneously having a vanishing or negative thermal expansion coefficient in the direction of the connecting axis (B-B) between the component ( 4 ) and the spatially-fixed component ( 1 ).
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申请公布号 |
US6894288(B2) |
申请公布日期 |
2005.05.17 |
申请号 |
US20030394201 |
申请日期 |
2003.03.24 |
申请人 |
LEO ELEKTRONENMIKROSKOPIE GMBH |
发明人 |
MUELLER HELMUT;TOBIAS DANIEL |
分类号 |
H01J37/09;H01J37/20;H01J37/26;(IPC1-7):H01J37/15;G02B21/34 |
主分类号 |
H01J37/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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