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发明名称
Controller module of apparatus for fabricating semiconductor
摘要
申请公布号
KR100490175(B1)
申请公布日期
2005.05.17
申请号
KR20020038673
申请日期
2002.07.04
申请人
发明人
分类号
H01L21/02;H01L21/00;H01L21/677;(IPC1-7):H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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