发明名称 |
Fluid ejection device with compressive alpha-tantalum layer |
摘要 |
A fluid ejection device is disclosed. The fluid ejection device may include a substrate including a heating element and a passivation layer in contact with the heating element. The fluid ejection device may further include a buffer layer in contact with the passivation layer and a compressive alpha-tantalum layer in contact with, and lattice matched to, the buffer layer.
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申请公布号 |
US6893116(B2) |
申请公布日期 |
2005.05.17 |
申请号 |
US20030426561 |
申请日期 |
2003.04.29 |
申请人 |
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. |
发明人 |
FARTASH ARJANG |
分类号 |
B41J2/14;(IPC1-7):B41J2/05 |
主分类号 |
B41J2/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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