发明名称 |
Substrate delivering robot |
摘要 |
A robot for carrying a substrate in which minimum turning radius is small when the arm is retracted although a plurality of forks are provided and installation area can be minimized. The robot comprises a fixed base, a first turnable arm linked with the fixed base, a second turnable arm linked with the first arm, and a turnable fork linked with the second arm, wherein the fork comprises a plurality of first and second independent forks. The first and second forks are fixed coaxially and vertically in two stages to the forward end part of the second arm such that they can turn independently and first and second fork drive motors are disposed in the second arm.
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申请公布号 |
US6893204(B1) |
申请公布日期 |
2005.05.17 |
申请号 |
US20030450652 |
申请日期 |
2003.06.16 |
申请人 |
KABUSHIKI KAISHA YASKAWA DENKI |
发明人 |
SUZUKI TAKEO;OGASAWARA MASARU;OMATA TOSHIO |
分类号 |
B25J9/06;B25J15/08;B65G49/06;B65G49/07;H01L21/677;(IPC1-7):B25J18/04 |
主分类号 |
B25J9/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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