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发明名称
SUBSTRATE CONVEYOR
摘要
申请公布号
KR20050045457(A)
申请公布日期
2005.05.17
申请号
KR20030079533
申请日期
2003.11.11
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KANG, SUNG YUN;KIM, HYE SEONG;LEE, IN HO;LEE, KANG HYUK;PARK, YOUNG KIL
分类号
H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/68
代理机构
代理人
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