发明名称 Stress relieved frame
摘要 An improved window frame and window piece for a micromirror assembly is disclosed herein. The window frame includes a stress-relieving contour positioned in the middle of the frame that can absorb the mechanical stresses applied to the window frame from the ceramic base and from the window piece. The window frame may be comprised of a single piece of sheet metal that has been stamped to include a stress-relieving contour. The stress-relieving contour may be comprised of a variety of shapes, including a "U" shape, an inverted "U" shape, a curved step shape, or other combinations thereof.
申请公布号 US6894853(B2) 申请公布日期 2005.05.17
申请号 US20020143232 申请日期 2002.05.10
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 HASKETT BRADLEY MORGAN;O'CONNOR JOHN PATRICK;SMITH STEVEN E.;MILLER MARK MYRON;KMECKO IVAN;LIU JWEI WIEN;FISHER EDWARD CARL;ARMSTRONG FRANK O.;ESTABROOK DANIEL C.;FARRIS JEFFREY E.
分类号 G02B26/08;(IPC1-7):G02B7/00;H01L23/02;H01L23/12 主分类号 G02B26/08
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