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发明名称
METHOD OF FORMING NOBLE METAL THIN FILM PATTERN
摘要
申请公布号
KR100490575(B1)
申请公布日期
2005.05.17
申请号
KR20020045262
申请日期
2002.07.31
申请人
发明人
分类号
H01L21/30;C03C17/36;C23F1/26;H01C7/00;H01C17/075;H01L21/02;H01L27/01;H05K3/04;(IPC1-7):H01L21/30
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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