LOW DIELECTRIC CONSTANT MATERIAL AND METHOD OF PROCESSING BY CVD,申请号KR20020028368-传众专利搜索

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发明名称	LOW DIELECTRIC CONSTANT MATERIAL AND METHOD OF PROCESSING BY CVD
摘要
申请公布号	KR100489758(B1)	申请公布日期	2005.05.16
申请号	KR20020028368	申请日期	2002.05.22
申请人		发明人
分类号	C23C16/42;H01B3/12;C03C3/04;C03C14/00;C23C16/30;C23C16/40;H01L21/312;H01L21/316;H01L21/768;H01L23/522;(IPC1-7):H01B3/12	主分类号	C23C16/42
代理机构		代理人
主权项
地址

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