发明名称 Elastic boundary wave device and method of manufacturing the same
摘要 An elastic boundary wave device includes a first piezoelectric substrate, IDTs arranged thereon, a first dielectric film having a smoothed surface that covers the IDTs, a second substrate that is a silicon-based substrate, and a second dielectric film provided on a main surface of the second substrate. The smoothed surface of the first dielectric surface and a surface of the second dielectric film are joined together.
申请公布号 US2005099091(A1) 申请公布日期 2005.05.12
申请号 US20040984836 申请日期 2004.11.10
申请人 FUJITSU LIMITED 发明人 MISHIMA NAOYUKI;MIURA MICHIO
分类号 H01L41/09;H01L41/18;H01L41/22;H03H3/08;H03H9/02;H03H9/145;H03H9/25;(IPC1-7):H03H9/25 主分类号 H01L41/09
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