A reactor defines a reaction chamber for processing a substrate. The reactor comprises a first inlet for providing a first reactant and to the reaction chamber and a second inlet for a second reactant to the reaction chamber. A first exhaust outlet removes gases from the reaction chamber. A second exhaust outlet removes gases from the reaction chamber. A flow control system is configured to alternately constrict flow through the first and second exhaust outlets. The reactor chamber is configured to for a diffusion barrier within the reaction chamber.
申请公布号
WO2005042160(A2)
申请公布日期
2005.05.12
申请号
WO2004US36301
申请日期
2004.10.29
申请人
ASM AMERICA, INC.;SHERO, ERIC, J.;MOHITH, VERGHESE, E.