INERTIAL SENSOR UNIT

摘要

PROBLEM TO BE SOLVED: To provide an inertial sensor unit which corrects the temperature dependence characteristics of a sensor output with high precision and detects accurate inertial force. SOLUTION: An A/D converter-equipped microcomputer 1 converts an analog voltage value V indicating a rate value (angular velocity) outputted by a signal processor 3b of an angular velocity sensor 3, temperature TSof an angular velocity sensing element section 3a by analog voltage values outputted by temperature sensor elements 5a, 5b, and temperature TAof the signal processor 3b to digital form by an A/D converter 1a and reads them. From the corrected value characteristics for the temperature changes of the angular velocity sensing element section 3a stored in advance, a corrected value CScorresponding to the detected temperature TSof the angular velocity sensing element section 3a is determined. From the corrected value characteristics for the temperature changes of the signal processor 3b, similarly, a corrected value CAcorresponding to the detected temperature TAof the signal processor 3b is determined. Then, the read rate value (angular velocity) V is corrected using the corrected value CAand the corrected value CS. COPYRIGHT: (C)2005,JPO&NCIPI