| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum suction device by which the time for suction and transfer is not prolonged due to the detection of the clogging of the nozzle, and a method for detecting the clogging of a suction nozzle. SOLUTION: The vacuum suction device 16 is so composed that the suction nozzle 1 is connected to a three-way valve 4, and a vacuum source 2 and a compressed air source 3 are exclusively selectably connected to the three-way valve 4. The vacuum suction device 16 has a flowmeter 5 between the three-way valve 4 and the compressed air source 3, and also, has a circuit which compares and determines 3 an indicated value of the flowmeter 5 and a design flow rate value. COPYRIGHT: (C)2005,JPO&NCIPI
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