CERAMICS FILTER AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To make a ceramics filter lightweight and to generate no pin hole and no crack on a porous thin film. SOLUTION: The ceramics filter has a skeleton structure having a three dimensional network shape with a large number of approximately spherical adjacent pores 1 communicating with each other through a communication hole 2 and having a porosity of 50-90%. The skeleton part is provided with a support 3 comprising a particle-bond type porous ceramics; and a porous thin film 4 comprising a particle-bond type porous ceramics formed on the support. COPYRIGHT: (C)2005,JPO&NCIPI