HETERODYNE OPTICAL SYSTEM FOR MEASURING BOTH SMALL ROUGHNESSES OF REFLECTIVE OBJECTS AND PHASE OBJECTS.

摘要

The present invention describes an optical system based on the principle of optical heterodyning, which measures microroughnesses of reflective materials by means of reflection and phase objects of transparent materials by means of transmission. The resolution of the system is increased upon reducing the light beam area in the plane of the detector; thereby the total resolution of the system may be measured in nanometers. The invention is a simple system that can be used in any type of objects without requiring a previous preparation. Moreover, is a cost effective system since the same uses the central part of the required optical components upon using a beam having a substantially small diameter, which does not affect the objects while measuring the same since there is no physical contact with the samples.