| 摘要 |
PROBLEM TO BE SOLVED: To provide a micromirror capable of operating in an oscillating mode due to bimorph actuation and being mass-produced. SOLUTION: The micromirror is disclosed which comprises a mobile part (11) with a reflecting area (19), a fixed part (12) and two torsion arms (14) materializing an axis (13) about which the mobile part (1) oscillates. The axis (13) passes through the mobile part (11) while being offset from the center of mass (M) of the mobile part (11), each torsion arm (14) has one end part connected to he fixed part (12) through a bimorph actuation means (15). Further, the bimorph actuation means (15) comprises a part (15.3) made of an active material capable of changing volume and/or shape under the effect of an excitation and an active flexible structure (15.2) co-operating with the member (15.3). COPYRIGHT: (C)2005,JPO&NCIPI
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