| 摘要 |
PROBLEM TO BE SOLVED: To provide a digital angular velocity detector with a MEMS (Micro Electro Mechanical System) applied thereto, having high accuracy irrespective of its simple structure. SOLUTION: This angular velocity detector is equipped with a stator, a rotor, and detection electrodes. The stator is formed on a substrate, and equipped with an annular first coil energized by pulses impressed thereon from the exterior. The rotor is rotatable by external force, and comprises a second coil disposed opposite to the first coil, with pulses induced in the second coil by an induction action, and further comprises a plurality of electrodes disposed at definite spaces on a curve formed with a prescribed radius from a center, with the electrodes energized by the induced pulses. The detection electrodes stand opposite, at a definite space, to a plurality of electrodes provided on the rotor. The detection electrodes each have a detection element for detecting the amount of rotation of the rotor on the basis of the number of changes in capacitance produced between an approached electrode and the detection electrode when approaching any one of the electrodes provided on the rotor. Such an angular velocity detector provides high resolution irrespective of dispensing with a complicated structure for resolution enhancement and can be used for a distance measurement other than the use of detecting the amount of rotation. COPYRIGHT: (C)2005,JPO&NCIPI
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