| 摘要 |
PROBLEM TO BE SOLVED: To obtain a droplet ejection head equipped with a diaphragm which has a high damping capacity, which exerts a sufficient pressure buffering capacity even in high-frequency drive and which can be easily manufactured, and its manufacturing method; and to obtain a recording apparatus for performing recording by using the obtained droplet ejection head, equipment for manufacturing a microarray by ejecting a biomolecule etc., and the like. SOLUTION: This droplet ejection head ejects a droplet from a nozzle 12, which communicates with a channel, by pressurizing a liquid such as ink infilled into the channel of an ejection chamber 5 etc. The droplet ejection head has a pressure buffering member 18A with a Poisson's ratio larger than 0.09, which is a Poisson's ratio of silicon, so as to buffer pressure applied to the liquid in directions except the direction of the nozzle 12. COPYRIGHT: (C)2005,JPO&NCIPI
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