| 摘要 |
PROBLEM TO BE SOLVED: To provide a cluster production apparatus for efficiently forming the cluster of a nanometric size, and to provide a cluster production method. SOLUTION: The cluster production apparatus (10) comprises: a cluster-producing portion (20) provided with a casing (12) capable of decompressing its inner part, a target-holding means (3A and 3B) for holding a target in the casing, a gas-supplying means (22 and 22A) for supplying a plasma source gas to the vicinity of the target held by the target-holding means so that the concentration in the vicinity of the target can be higher than the other space in the casing, and a plasma-generating means (27A and 27B) for converting the plasma source gas supplied in the casing into a plasma state; and a cluster-growing portion (30) provided with a cluster duct (36) for transferring the cluster produced in the cluster-producing portion together with a carrier gas. COPYRIGHT: (C)2005,JPO&NCIPI
|
