ULTRAVIOLET IRRADIATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an ultraviolet irradiation device constituted so as to permit the use of a relatively small amount of gas. SOLUTION: Each of unit doors 41 constituting a door device 40 opens in predetermined timing when receiving the matter detecting signal S from each of the photoelectric sensors 43 respectively provided on this side of the unit doors 41 and closes in predetermined timing when receives no matter detecting signal S from each of the photoelectric sensors 43. That is, even if the posture of a work W fed to the door device 40 is inclined, the unit doors 41 are subjected to on-off operation so as to pass the work W while opening only the unit doors 41 at the position corresponding to each of the regions of the work W. COPYRIGHT: (C)2005,JPO&NCIPI