METHOD OF FABRICATING AN ELECTRON MULTIPLIER ARRAY

摘要

A method of fabricating an electron multiplier array in which a plurality of apertures are etched through a construct (20) of a dynode layer (11) and an electrical-insulating layer (12) with a jet of hard powders (22). The construct (20) is then divided into smaller discrete segments and stacked such that the apertures in adjacent segments align to form channels. Alternatively, rather than dividing the construct (20) into smaller segments, a plurality of constructs (20) may instead be stacked to create a large-area electron multiplier array.