发明名称 |
UNIFORM CAVITATION FOR PARTICLE REMOVAL |
摘要 |
Systems and methods for promoting a substantially uniform cavitation field. With system (100) including a diaphragm (109) dividing a container (103), a second energy pulse corresponding to a first energy pulse arising from collapse of a cavity C is produced and is used to determine whether to adjust a corresponding transducer 121-k. In system (16), a cavity creating unit (11), including an assembly of transducers 15-i, is moveable from a test liquid to a particle removal (PR) liquid after transducer testing. In another system, a sensor plate (170) having an array of sensors 171-j provides a virtual wafer. A substantially uniform field of cavitation may be maintained by a cavity enhancement liquid, or adjustment of transducer energy. Mechanisms of holding an object produce substantially uniform cavitation. Opposed transducers in a container having monotonically decreasing and/or increasing cavitation density produce substantially uniform cavitation density. |
申请公布号 |
WO2004110657(A3) |
申请公布日期 |
2005.05.12 |
申请号 |
WO2004EP51020 |
申请日期 |
2004.06.03 |
申请人 |
SEZ AG;FERRELL, GARY W.;SCHIPPER, JOHN F.;RATRA, JAGJIT S. |
发明人 |
FERRELL, GARY W.;SCHIPPER, JOHN F.;RATRA, JAGJIT S. |
分类号 |
B08B3/12;H01L21/00 |
主分类号 |
B08B3/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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