摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pore structure showing excellent adhesion with a substrate electro-conductive layer and having a surface with improved flatness, to provide its production method, to provide a memory device using the pore structure, to provide its production method, to provide an adsorption amount analyzer, and to provide a magnetic recording medium. <P>SOLUTION: A base electro-conductive layer 2 and an Al-Hf alloy layer 3 (or a stacked body of the Al-Hf alloy layer 3 and an Al layer) are formed on a substrate 1 in a stacked state. A simple substance composed of Pt, Ir, Pd, Rh, Au, Ag, Ru, Cu or Ni or an alloy thereof having satisfactory adhesion to the Al-Hf alloy layer 3 is used for the base electro-conductive layer 2. Next, the Al-Hf alloy layer 3 (or the stacked body) is anodized in an acid aqueous solution to form a nanohole structure having nanoholes 8, and, if required, the nanoholes 8 are subjected to width expansion working by etching. Then, a functional material 10 such as a ferroelectric material, a ferromagnetic material, a variable resistance material, a phase transition material and a phosphor material is filled into the nanoholes, by which the nanohole structure having various functions is produced. <P>COPYRIGHT: (C)2005,JPO&NCIPI |