发明名称 METHOD TO ETCH CHROME DEPOSITED ON CALCIUM FLUORIDE OBJECT
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for maintaining a micro-roughness finish after etching chrome from a surface of a calcium fluoride (CaF2) object. <P>SOLUTION: The chrome a first amount is etched in a first chrome etchant. The chrome a second amount beyond the first predetermined amount is etched in a second chrome etchant. Thus, the CaF2 object maintains a low micro-roughness. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005120477(A) 申请公布日期 2005.05.12
申请号 JP20040298174 申请日期 2004.10.12
申请人 ASML HOLDING NV 发明人 DELUCA NICHOLAS A;ALBRIGHT RONALD P
分类号 G02B5/18;C23F1/00;C23F1/26;C23F1/38;G03F1/08;G03F1/14 主分类号 G02B5/18
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