发明名称 |
METHOD TO ETCH CHROME DEPOSITED ON CALCIUM FLUORIDE OBJECT |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for maintaining a micro-roughness finish after etching chrome from a surface of a calcium fluoride (CaF2) object. <P>SOLUTION: The chrome a first amount is etched in a first chrome etchant. The chrome a second amount beyond the first predetermined amount is etched in a second chrome etchant. Thus, the CaF2 object maintains a low micro-roughness. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
申请公布号 |
JP2005120477(A) |
申请公布日期 |
2005.05.12 |
申请号 |
JP20040298174 |
申请日期 |
2004.10.12 |
申请人 |
ASML HOLDING NV |
发明人 |
DELUCA NICHOLAS A;ALBRIGHT RONALD P |
分类号 |
G02B5/18;C23F1/00;C23F1/26;C23F1/38;G03F1/08;G03F1/14 |
主分类号 |
G02B5/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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