发明名称 METHOD FOR REFINING COLLOIDAL SILICA
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a method for refining colloidal silica used as a catalyst carrier, a filler for chromatography, an additive for a coating agent or an abrasive for an electronic material. <P>SOLUTION: The method for refining the colloidal silica comprises a step wherein the colloidal silica is acidified and a step wherein hydroxycarboxylic acid and/or oxycarboxylate is added before a step wherein concentration is performed through ultrafiltration. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2005119911(A) 申请公布日期 2005.05.12
申请号 JP20030357507 申请日期 2003.10.17
申请人 SPEEDFAM CO LTD 发明人 TANAKA HIROAKI
分类号 B24B37/00;C01B33/148;C09K3/14;H01L21/304;(IPC1-7):C01B33/148 主分类号 B24B37/00
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