摘要 |
PROBLEM TO BE SOLVED: To provide an organic EL device having characteristics about equivalent to those of an organic EL element using a conventional Al deposited cathode, a high film formation throughput, and a long service life, and a manufacturing method of the organic EL device. SOLUTION: In this organic EL device, a first electrode 111, a functional layer 110 having at least a luminescent layer 110b of an organic material, and a second electrode 12 are disposed on a substrate 2 in this order, and at least multi-layered transparent films, provided with a layer functioning as the second electrode, 12 is disposed on the functional layer 110, and the transparent film 12a nearest the functional layer is made of SiON. COPYRIGHT: (C)2005,JPO&NCIPI
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