OPTICAL WAVEGUIDE COMPONENT AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an optical waveguide component in which connection end face is formed at the time of chip cutting and reinforcing material is provided for connection to an optical fiber and to provide its manufacturing method. SOLUTION: A reinforcing glass plate 4 is connected onto an optical waveguide wafer 2 having a plurality of waveguide components 1 through a connection Si layer 3 by anode connection. Having made the connection above, the optical waveguide parts 2 are cut and divided by a rotating grinding wheel 5 with the reinforced glass plate 4 so that the cutting end faces to be slanted. COPYRIGHT: (C)2005,JPO&NCIPI