DEVICE AND METHOD FOR INSPECTING SOLUTION SUPPLY APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an inspection device capable of easily inspecting whether or not a solution has been delivered through a nozzle of a solution supply apparatus. SOLUTION: The inspection device inspects whether or not a solution has been jetted through each nozzle of a solution supply apparatus having a plurality of nozzles and comprises the following: a CCD camera 21 for imaging the solution supply apparatus to output a video signal; a synchronizing signal extraction circuit 24 which extracts a vertical synchronizing signal and a horizontal synchronizing signal by the input of the video signal from the CCD camera; a comparison circuit 26 into which the video signal from the CCD camera is input through the synchronizing signal extraction circuit; and a control device 27 into which the vertical and horizontal synchronizing signals from the synchronizing signal extraction circuit are input and which, based on the input, compares a specified horizontal synchronizing signal of the video signal input into the comparison circuit with a threshold value and counts pulse signals higher than the threshold value contained in the horizontal synchronizing signal to calculate the number of nozzles jetting the solution. COPYRIGHT: (C)2005,JPO&NCIPI