APPARATUS AND METHOD OF FORMING COATING FILM

摘要

PROBLEM TO BE SOLVED: To provide a method of forming a coating film by which the coating film is formed while the film thickness of a coating composition applied on a material to be coated is controlled with high accuracy with a simple apparatus without being affected by a change in atmospheric pressure, and to provide an apparatus for forming the coating film. SOLUTION: A coating process is carried out in a chamber 5 where the atmospheric pressure is controllable. The atmospheric pressure is controlled by allowing a control unit 12 to control a pressure sensor 18, a mass flow controller 14 which is a gas quantity control part, and pumps 15 and 17. The atmospheric pressure in the coating process is controlled to 8×104to 2×105. The rotation of the material to be coated is controlled by a rotation speed control part of the control unit 12 and the coating is carried out under a rotation speed condition corresponding to a prescribed value of the atmospheric pressure. COPYRIGHT: (C)2005,JPO&NCIPI