发明名称 Ferroelectric capacitor
摘要 A ferroelectric capacitor including a lower electrode, a ferroelectric layer and an upper electrode. A part of at least any one of the lower and upper electrodes is formed of a material selected from the group consisting of TiOx, TaOx, ReOx, WOx, IrO<SUB>2</SUB>, PtO<SUB>2</SUB>, RuOx, PdOx, and OsOx.
申请公布号 US2005098819(A1) 申请公布日期 2005.05.12
申请号 US20040015082 申请日期 2004.12.16
申请人 发明人 NAKAMURA TAKASHI
分类号 H01G4/33;H01L21/02;H01L21/314;H01L21/3205;H01L21/768;H01L27/08;(IPC1-7):H01L29/94 主分类号 H01G4/33
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