摘要 |
A ferroelectric capacitor including a lower electrode, a ferroelectric layer and an upper electrode. A part of at least any one of the lower and upper electrodes is formed of a material selected from the group consisting of TiOx, TaOx, ReOx, WOx, IrO<SUB>2</SUB>, PtO<SUB>2</SUB>, RuOx, PdOx, and OsOx.
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