| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid transfer device in which the position accuracy of a piezoelectric ceramic layer can be improved. <P>SOLUTION: Columnar positioning protrusions 31 are provided in the position corresponding to the center of the piezoelectric ceramic layer 27 on a fixture substrate 30. A green sheet 32 is laid over the fixture substrate 30 and cut apart by a laser 33 or the like and then baked, and the respective piezoelectric layer 27 (sheet piece 32a) is attached to a flexible sheet 26. By providing the positioning protrusion 31, a displacement due to the shrinkage of the piezoelectric ceramic layer 27 during baking can be prevented. Consequently the position accuracy can be improved when the respective piezoelectric ceramic layer 27 is attached to the flexible sheet 26. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
