发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To inexpensively manufacture a semiconductor device containing a high-withstand voltage insulated gate field effect transistor through a simple manufacturing process. SOLUTION: A drain region of the high-withstand voltage insulated gate field effect transistor (HVMOSFET) is constituted of a low-concentration drain region. In addition, a field oxide film is formed between the low-concentration drain region and a gate electrode. Moreover, the low-concentration drain region is formed by simultaneously doping the separating area of each transistor and the low-concentration drain region with an impurity element for separation and, at the same time, doping the low-concentration drain region with an opposite impurity element. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005123644(A) 申请公布日期 2005.05.12
申请号 JP20040365731 申请日期 2004.12.17
申请人 SEIKO INSTRUMENTS INC 发明人 KOJIMA YOSHIKAZU;KAMIYA MASAAKI;ISHII KAZUTOSHI;OMOYA YASUHIRO
分类号 H01L21/8234;H01L27/088;H01L29/78;(IPC1-7):H01L29/78;H01L21/823 主分类号 H01L21/8234
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