| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and apparatus for manufacturing thin film filter capable of manufacturing a thin film filter having a desired optical film thickness distribution over wide radial positions on a rotating base plate, and to provide a high performance thin film-fixed filter and thin film tunable filter. SOLUTION: In the method and apparatus for manufacturing the thin film filter, a white light source and a spectroscope, or a tunable light source and a power meter are disposed, an optical mechanism which allows optical beams to branch to the radial positions of at least two or more of different spots on the rotating base plate and to be transmitted is disposed, a means of calculating the deposition speed and the refractive index in the radial direction on the base plate from the light quantity of the optical beams is disposed and, thereby, the deposition speed distribution or the refractive index distribution on the base plate is controlled. COPYRIGHT: (C)2005,JPO&NCIPI
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