| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film production device where a thin film having a uniform film thickness can be produced, also, the productivity of the thin film is improved, and further, the inside can efficiently be ventilated, and to provide a thin film production method. SOLUTION: The thin film production device comprises: a means 18 for preheating a planar substrate; a means for sucking the preheated planar substrate on a hot plate 19; and a means 20 for spraying a solution comprising the raw material for a thin film on the surface of the planar substrate sucked on the hot plate 19. The thin film production method comprises: a stage where the planar substrate is preheated; a stage where the preheated planar substrate is sucked on a hot plate; and a stage where a solution comprising the raw material for a thin film is sprayed on the surface of the planar substrate sucked on the hot plate. COPYRIGHT: (C)2005,JPO&NCIPI
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