| 摘要 |
PROBLEM TO BE SOLVED: To provide a tabular member conveying system capable of saving energy as compared with a constitution in which compression air is injected to a tabular member and it is stored in the non-contact state and unnecessitating to newly aquire a wide installation space when a storage device functioning as buffer is installed. SOLUTION: In the tabular member conveying system 11, a conveying route 12 is constituted in such away that sound wave floating devices 13 are arranged in series and a tabular member storage device 14 is provided on the way of the conveying route 12. In the tabular member storage device 14, a plurality of sound wave floating devices 13 capable of retaining and conveying the tabular member in the floating state are vertically superposed and arranged and are vertically movably provided. Further, the respective sound wave floating devices are arrangeably provided at a position constituting a part of the conveying route 12. The sound wave floating device 13 constituting the conveying route 12 and the sound wave floating device of the tabular member storage device 14 basically have the same constitution. COPYRIGHT: (C)2005,JPO&NCIPI
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