METHOD FOR FORMING PHOTO-DEFINED MICRO ELECTRICAL CONTACTS
摘要
A method of manufacturing a probe test head for testing of semiconductor integrated circuits includes: defining shapes of a plurality of probes (81) as one or more masks (73); a step for fabricating the plurality of probes using the mask (73); and disposing the plurality of probes (81) through corresponding holes in a first die (42) and a second die (44). The step for fabricating the plurality of probes (81) may include one of photo-etching and photo-defined electroforming.
申请公布号
WO2005043594(A2)
申请公布日期
2005.05.12
申请号
WO2004US34963
申请日期
2004.10.22
申请人
WENTWORTH LABORATORIES, INC.
发明人
MCQUADE, FRANCIS, T.;BARTO, CHARLES, L.;TRUCKLE, PHILLIP, M.