FABRICATION OF THERMAL DETECTING STRUCTURES

摘要

Methods for use in fabricating thermal detecting structures include altering contact regions thereof (i.e., exposed surfaces of thermal detecting material) for use in the formation of electrical connection to conductive contacts thereof. For example, the thermal detecting material may be vanadium oxide and the alteration may be performed by back sputtering the contact region using inert gas ions. The formation of the electrical connection to the conductive contacts includes providing conductive material in contact with at least the altered contact regions.