| 摘要 |
PROBLEM TO BE SOLVED: To provide a buffer capable of reducing the change of spring force of a magnetic spring caused by evacuation. SOLUTION: In this buffer 1, a movable shaft 13 having a suction pad 12 on its tip end part is slidably inserted into a cylindrical body 11, the body 11 and the movable shaft 13 are respectively provided with permanent magnets 21, 22 constituting the magnetic spring 20, and the reaction force received by the movable shaft 13 is absorbed by the spring force of the magnetic spring 20 by pressing the suction pad 12 to a transferred object. The movable shaft 13 has a longitudinal hole 14a communicated with a suction face 12a of the suction pad 12 and a transverse hole 14b communicated with the longitudinal hole on its shaft core part, body-side channels 35, 33, 36, 38 communicating from the transverse hole 14b of the movable shaft 13 and a vacuum port 37 are formed in the body 11, and the transverse hole 14b and the body-side channels are connected in an air-tight state by seal members 25, 26 mounted to the movable shaft 13 in a state that the transverse hole 14b is axially located therebetween. COPYRIGHT: (C)2005,JPO&NCIPI
|
