FERROELECTRIC FILM, MANUFACTURING METHOD THEREOF, FERROELECTRIC CAPACITOR AND FERROELECTRIC MEMORY

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a ferroelectric film having sufficient crystal quality, and to provide the ferroelectric film obtained by the manufacturing method. SOLUTION: The manufacturing method of the ferroelectric film includes a process for electro-depositing particles of a first ferroelectric material to an electrode by a hydrothermal electrodeposition method, and forming a ferroelectric initial nuclear layer 54; a process for charging particles of a second ferroelectric material; a process for electro-depositing the charged particles of the second ferroelectric material to the ferroelectric initial nuclear layer 54 by a migration electrodeposition method, and forming a ferroelectric material film 50; and a process for thermally treating the ferroelectric material film 50. COPYRIGHT: (C)2005,JPO&NCIPI