| 摘要 |
PROBLEM TO BE SOLVED: To provide a particle size distribution measuring instrument capable of measuring a particle size distribution up to a fine particle size range by more simple constitution, compared with a conventional laser diffraction/scattering type particle size distribution measuring instrument. SOLUTION: A phosphor 3c is arranged close-contactingly or adjacently on a detection face of a photodiode array 3b for measuring a spatial intensity distribution of diffraction/scattering light by a measured particle group P, using a laser 2a generating an ultraviolet laser beam as a light source for a laser beam for irradiating the measured particle group P, a lower limit for measuring the particle size distribution by shortening in a wavelength of the emission laser beam is thereby lowered, and the spatial intensity distribution of the diffraction/scattering light in an ultraviolet area is detected by the usual photodiode array 3b via fluorescence generated by the phosphor 3c. COPYRIGHT: (C)2005,JPO&NCIPI
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