| 摘要 |
A high resolution and high data rate spot grid array printer system is provided, wherein an image representative of patterns to be recorded on a reticle or on a layer of a semiconductor die is formed by scanning a substrate (160) with electron beams. Embodiments include a printer comprising an optical radiation source (105) for irradiating a photon-electron converter with a plurality of substantially parallel optical beams, the optical beams being individually modulated to correspond to an image to be recorded on the substrate. The photon-electron converter produces an intermediate image composed of an array of electron beams corresponding to the modulated optical beams. A de-magnifier (155) is interposed between the photon- electron converter and the substrate, for reducing the size of the intermediate image. A movable stage (167) introduces a relative movement between the substrate and the photon-electron converter, such that the substrate is scanned by the electron beams. |
