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发明名称
VORRICHTUNG UND VERFAHREN ZUM ANSTEUERN WENIGSTENS EINES KAPAZITIVEN STELLGLIEDES
摘要
申请公布号
DE59712262(D1)
申请公布日期
2005.05.12
申请号
DE19975012262
申请日期
1997.07.22
申请人
SIEMENS AG
发明人
HOFFMANN, CHRISTIAN;FREUDENBERG, HELLMUT;GERKEN, HARTMUT;HECKER, MARTIN;PIRKL, RICHARD
分类号
H01L41/04;(IPC1-7):H01L41/04
主分类号
H01L41/04
代理机构
代理人
主权项
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