发明名称 Single mask via method and device
摘要 A method of connecting elements such as semiconductor devices and a device having connected elements such as semiconductor devices. A first element having a first contact structure is bonded to a second element having a second contact structure. A single mask is used to form a via in the first element to expose the first contact and the second contact. The first contact structure is used as a mask to expose the second contact structure. A contact member is formed in contact with the first and second contact structures. The first contact structure may have an aperture or gap through which the first and second contact structures are connected. A back surface of the first contact structure may be exposed by the etching.
申请公布号 AU2004286545(A1) 申请公布日期 2005.05.12
申请号 AU20040286545 申请日期 2004.10.20
申请人 ZIPTRONIX, INC. 发明人 PAUL M. ENQUIST
分类号 H01L21/768;H01L21/98;H01L23/48;H01L23/538;H01L25/065 主分类号 H01L21/768
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