PIEZOELECTRIC THIN FILM ELEMENT, INK JET HEAD, INK JET TYPE RECORDER, ANGULAR VELOCITY SENSOR, AND PIEZOELECTRIC ACTUATOR FOR DISK UNIT

摘要

PROBLEM TO BE SOLVED: To provide a technology of decreasing the dependence of the piezoelectric characteristic of a piezoelectric thin film 103 in a piezoelectric thin film element used for an ink jet or the like on the electric field strength and enhancing the piezoelectric characteristic at a low electric field strength.

SOLUTION: The piezoelectric characteristic of the piezoelectric thin film 103 is selected to be a material satisfying a relation of 1/3≤¾(Absolute value (Ec+) - absolute value (Ec-))¾/(absolute value (Ec+) + absolute value (Ec-))<1, wherein Ec+ is a positive coercive electric field of the piezoelectric material and Ec- is a negative coercive electric field of the piezoelectric material, that is, a material whose coercive electric field is greatly biased to the positive or negative value.

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