| 摘要 |
PROBLEM TO BE SOLVED: To provide an analyzer for reporting information on how much the concentration of an element is less than the detection lower limit, by reporting the detection lower limit value for an element in which concentration is not calculated without identification to an operator, and to provide a method for controlling the analyzer. SOLUTION: The analyzer comprises a charged particle beam source 1; an electronic optical system 18 for controlling charged particle beams 6 radiated from the charged particle beam source 1 for irradiating a sample 7; an analysis information acquiring means for acquiring analysis information generated from the sample 7 according to the irradiation with the charged particle beam 6; a storage section 16 for storing the detection lower-limit data to be detected; and an outputting means 13 for combining analysis information acquired by the analysis information acquiring means with detection lower-limit data corresponding to the detection target for outputting. COPYRIGHT: (C)2005,JPO&NCIPI
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