| 摘要 |
PROBLEM TO BE SOLVED: To enable a substrate to be conveyed horizontally without contacting with a substrate floating block, when the substrate is floated and conveyed to a substrate lifting block. SOLUTION: This substrate conveying device comprises substrate floating blocks 1, 11 and 16 for floating the substrate 3 in a non-contact state, a conveying mechanism for holding and conveying the end of the substrate 3 floating on the substrate floating blocks 1, 11 and 16, and end supporting mechanisms 49 which are disposed on both sides or at positions close to both sides of the substrate floating blocks 1, 11 and 16 in the conveying direction C of the substrate 3 and support, from the lower surface side, both ends of the substrate 3 projecting from both sides of the substrate floating blocks 1, 11 and 16. COPYRIGHT: (C)2005,JPO&NCIPI
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